Phase change memory technology

Geoffrey W. Burr, Matthew J. Breitwisch, Michele Franceschini, Davide Garetto, Kailash Gopalakrishnan, Bryan Jackson, Bülent Kurdi, Chung Lam, Luis A. Lastras, Alvaro Padilla, Bipin Rajendran, Simone Raoux, Rohit S. Shenoy

Journal: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Publisher: American Vacuum Society

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